slurry polishing
常见例句
- Chemical mechanical polishing Rough surface Microscale flow Polishing slurry;
化学机械抛光; 粗糙表面; 微尺度流动; 抛光液; - Laser inducement fluorescence (LIF) is used to study the effect of polishing parameters on slurry film thickness.
本文采用激光诱导荧光技术(LIF)来研究抛光参数对化学机械抛光加工区液膜厚度的影响。 - The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.
研究表明,抛光液膜厚度随着抛光速度的增加而增加,增加的趋势随抛光转速的提高而减缓。 返回 slurry polishing